PURPOSE OF IMA

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The Purpose of the Integrated Measurement Association (IMA) is to accelerate the implementation of Advanced Process Control (APC) for semiconductor manufacturing and the enabling integrated measurement technologies required to provide reliable data used for Run-to-Run (R2R) Control and Fault Detection and Classification (FDC). The IMA is focusing its attention on the following tasks:

• Promoting the value of APC.
• Fostering better communication among end-users, suppliers of sensors and integrated metrology, software suppliers, and process tool manufacturers to identify key problems that can be solved by the incorporation of APC system solutions.
• Providing a forum at IMA meetings for end-users and providers to communicate their requirements and solutions respectively.
• Participating in the definition and driving implementation of SEMI Standards for integrated measurement sensors and their interfaces as well as International Technology Roadmap for Semiconductors (ITRS) definitions.
• Conducting workshops whose purpose is identification and development of solutions to barriers that hinder the implementation of APC and associated integrated measurement technologies.

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