Requirements for Sensors

• Integrated Metrology for product wafers.
  
• In situ wafer surface particle and defect monitors.
  
• Develop and provide drivers for APC packages
  • Support sensor bus standards
    
  • Support migration to sensor bus solutions to support intelligent sensors and distributed systems
    

• Standardization to enable plug-n-play and mix-n-match
• High reliability, reproducibility, accuracy, speed and stability
• Low cost/high ROI
• Internal health diagnostics.
• Standard connections to Sensor Bus or Piggy Back PC
• Provide proof of concept/value for the various sensors
• Time stamped sensor data synchronized to tool data time stamp.
• Support of Pilot Studies.Fail-safe integration methods.