Requirements of Software (both OEM and Third Party)

• Standard CIM / APC Framework for Integration.
• Support connections to local Piggy-Back P.C. and integrated Factory Wide network Software
• Interchangeability of standard elements and functions (Fault detection,Control, SPC, Database, sensors, etc)
• Collection, storage, analysis and correlation of wafer-state (metrology) data, process-state (sensor) data and the associated tool-state (trace) data
• Infrastructure for feed-forward and feedback control. Track Wafer I.D., recipe I.D., chamber I.D., etc.
• Support Collection of collects stand-alone metrology and integrated metrology data.