IMA Member Abstract Submittals

Estimating the Costs, Benefits, and Return on Investment of Integrated Semiconductor Process Metrology

Daren L. Dance-Wright Williams & Kelly
Peter A. Rosenthal On-Line Technologies, Inc.
And
Wim Aarts Wacker-Siltronic Corporation

The Next Steps in Advanced Process Control

Advanced Process Control Systems

P.R. Solomon, P.A. Rosanthal, & V. Yakovlev -
On-Line Technologies, Inc.
B. Van Eck - Sematech
C.M. Nelson & M.L. Spartz - Advanced Fuel Research
A.Gower, T. Smith & D. Boning - Massachusetts Institute of Technology
A. Waldhauer - Applied Materials
W. Aarts - Wacker Siltronic Corp.

(Originally published in the April 1999 issue of A2C2. Used with permission.)